3 elect and 2 elect mech permits for cymer complex to include as follows building 6 euva add 1 elect receptacle

Misc elec for installation of ups on 2nd floor for cymer

Misc electrical to include panel upgrade for "cymer"

Misc electrical, new transformer (first floor) for "cymer, inc".

3 elect and 2 elect/mech permits for cymer complex to include as follows building 4 breadboard lab mech and elect to remove 2 and relocate 3 disconnects, and add 3 hepa filters

Misc electrical -- adding two amp circuits to existing panel on the 3rd floor for "cymer, inc"

Activating existing permitred bus dock for cymer

Misc electrical for modifying 3 existing 40 amp switch gears for cymer 4-29-16 renewed at 25% in order to final. Must have valid inspection within 1 days to keep permit active... Cag 2 12 14 permit renewed @ 25% of todays fees; must have valid inspection within 1 days... Vmt

Comm ti for cymer llc for floor mounted 2 ton (44 lb) capacity bridge crane system installation for assembly of cymer euv units, misc elec. (this is a 3rd crane see previous permit pds2013-comalt-000581 for other 2 cranes) your project may need to comply with cool roof requirements based on the 2008 building energy efficiency standards. Products required to comply must be labeled by the cool roof rating council (crrc), listed in the crrcs rated product directory (www. Coolroofs. Org), and tested for solar reflectance and thermal emittance. Your building inspector will check for compliance at inspection.

3 elect and 2 elect mech permits for cymer complex to include as follows building 4 suites 2627, 2630, and 2634 elect only to relocate disconnect breadboard lab mech and elect to remove 2 and relocate 3 disconnects, and add 3 hepa filters building 6 euvb add 3 elect receptacles euva add 1 elect receptacle rooftop chiller mech and elect only to add 3 new chillers and 2 new pumps

Misc industrial elec and new transformer & 4 volt distrubution for existing cymer

Comm ti for cymer to add interior partition (28 lf) to create shipping and training area and misc elect to relocate (2) existing light fixtures and add new receptacle

Misc mech elec for duct work and registers, and lighting for cymer, inc. Rm 1218

Adding argon & h drop & new air compressor for cymer, inc.

Misc p relocate plumbing to heat exchanges (2) for cymer

Commercial misc plumbing "exstending process piping and clean room addition

Replace relocate hydrogen tank with larger tank & pad, 3 sf cmu enclosure, & replace 143 sf trash enclosure, misc elec for relocate grounding for cymer

Tenant improvement to 25,5 sq ft to the 3rd floor of cymer. Adding interior paritions to create 8 conference rooms, 18 offices, 1 coffee copy room and 1 each mens and womens restroom. Misc electrical, plumbing and mechanical. Removing double door in exisitng seperation wall between existing offices and equipment located on this floor already.)

Tenant improvement to 25,5 sq ft to the 3rd floor of cymer. Adding interior paritions to create 8 conference rooms, 18 offices, 1 coffee copy room and 1 each mens and womens restroom. Misc electrical, plumbing and mechanical. Removing double door in exisitng seperation wall between existing offices and equipment located on this floor already.)

3 sf ceiling to clean rm. To attach to deck for existing cymer

Misc mech and misc elec for cymer 05 27 14 plan change structural only add seismic anchors to oven replacement see c of a... Vmd

Signs for cymer to include re-facing of two (2) existing signs - illuminated channel letters monument sign and illuminated wall sign on parking structure 5/2/2016 plan change. Revised feature of sign. See c of a... Ss

Misc electrical to add 3 disconnects and connection to new exhaust fan for "cymer" 11 21 14 plan change mounting see c of a... Vmd

Misc mech elec for cooling piping and hvac modification for process equipment for cymer 4-29-16 renewed at 25% in order to final. Must have valid inspection within each 180days to keep permit active... Cag

3 elect and 2 elect mech permits for cymer complex to include as follows building 4 breadboard lab mech and elect to remove 2 and relocate 3 disconnects, and add 3 hepa filters

Installation of compressed air and argon piping for cymer 4 18 16 notice to abandon permit form given to customer. Cdc

3 elect and 2 elect mech permits for cymer complex to include as follows building 4 suites 2627, 2630, and 2634 elect only to relocate disconnect

Supply air, return air & and exhaust air duct work for cymer inc.

Misc electrical adding electrical panel to 2nd floor for cymer 4-29-16 renewal at 25% in order to final. (must have valid inspection within each 1 days to keep permit active... Cag 2 12 14 permit renewed @ 25% of todays fees; must have valid inspection within 1 days... Vmt

16,721 sqft ti to include new concrete pads & footings for cooling equipment, misc. Mech & elec. Upgrades, & plumbing piping for new equipment including two cooling towers for cymer inc. In 1st floor central plant 7-20-2012 plan change adding plumbing to this permit vam. See c of a for explanation 7-16-2012 plan change please see conidtions of approval for explanation of permit. Vam

Ti for cymer to add new testing room by adding 35 lf interior partitions to open storage area inthe manufacturing area and misc elect

Misc electrical - adding 40 amp 480-v buss duct & related equipment for cymer 4-29-16 renewal at 25% in order to final, must have valid inspection within each 1 days to keep permit active for one year. Cag 2 12 14 permit renewed @ 25% of todays fees; must have valid inspection within 1 days... Vmt

16,721 sqft ti to include new concrete pads & footings for cooling equipment, misc. Mech & elec. Upgrades, to be done with this first permit ( & misc. Mech & plumbing piping for new equipment including two cooling towers for cymer inc. In 1st floor central plant to be done with 2nd permt but using the same set of plans for all) 7-16-2012 plan change please see conidtions of approval for explanation of permit. Vam 6-29-12 this plan check replaces abandoned plan check 1017-20080173... Cag

Misc mechanical for argon line (this replaces 1005-20120064 which is canceled customer states they are only doing the mechancial part) 4 18 16 permit renewed @ 25% of todays fees; must have valid inspection within 1 days. Cdc 2 12 14 permit renewed @ 25% of todays fees; must have valid inspection within 1 days... Vmt

Roof mounted equipment -- hydrogen vent fan, supply piping, and vent shaft down to the 1st floor for "cymer inc." 4 27 12 plan change; see c of a... Vmt 4 6 12 plan change; see c of a... Vmt

Misc plumbing and mechanical for ductwork for 1310 1211 and air rebalance. Extension of existing untilities in room 1211 to service relocated equipment for cymer. 4 18 16 permit renewed @ 25% of todays fees; must have valid inspection within 1 days. Cdc 2 12 14 permit renewed @ 25% of todays fees; must have valid inspection within 1 days... Vmt

Misc electrical for removing disconnect and adding 2 new 4 amp disconnect and also relocating 6 disconnects.

Comm ti for cymer misc elec mech mech relocate hvac to exterior,new sink, remove replace partial slab to support new bridge crane, 52 lf infill exterior doors roll-up-doors, and 593 lf interior walls to be removed, relocate process piping to source chamber, relocate mech ducting, moving 4 disconnects (last 3 from previous permits) 7 21 2015 plan change to identify future work no longer permitted under this permit... Ss 3 10 2015- plan change to existing clean room power t see c of a vam 2 13 15 plan change -- multiple strl, electrical & mechanical changes; see c of a... Vmt 11-26-2014 plan change add structural details for ceiling. Vam

2 material moving cranes (interior) for cymer. Middle of section b 1st floor., changing supports of ex. 10", water pipes along west wall. 5 10 2017 renewed at 25% of current fees. Must have a valid inspection every 1 days to keep active... Ss 05-03-16 permit renewed @ 25% of current fees... Must call for a valid inspection within 1 days... Tlh 4 3 14 change to contractor; see comment in c of a... Vmt 3-5-2014 plan change removing m1 crane from project vam. 11 14 13 plan change see c of a... Vmd

Ti to 1st flr of building 6 for cymer inc as follows demolition and reinstallation of non-load bearing demountable modular cleanroom wall system to reconfigure the existing clean room space, new non-bearing walls will also be constructed for lab support rooms. The lab support rooms will have a ceiling and the remainder of the spaces will utilize the existing structural ceiling. Misc mechanical to include new branch ducting, registers and grilles to serve area of work, plumbing will consist of new piping to service area of work new mop sink, new drains associated with washing equipment. New lighting and switching will be provided to serve area of work

T. I. For (e) cymer to reconfig. The (e) manufacturing area, work includes depressing 44 sqft of slab on grade (depressing 30" around (e) footing) to accomodate a raised floor for cranes (to be on a seperate permit). Cap off 2 (e) floor drains. No epm 6 15 2017 plan change. See c of a for details... Ss

4872 sq. Ft. Tenant improvement for cymer, inc. Project includes 194 linear feet of interior partitions, 485 linear ft. Of cubical parititions, 2 amp electrical service. The project expands an existing cymer, inc. Office to include: 4 enclosed offices, 1 operations room, and 1 conference room. No change in use or ownership. Restroom are communal and not a part of this project. 3-14-07 plan change see conditions of approval. Vam